12/1/2012	7:00:04 AM	Helium valve closed
12/1/2012	7:00:04 AM	H2 valve closed
12/1/2012	7:00:04 AM	BCl3 valve closed
12/1/2012	7:00:04 AM	PH3 valve closed
12/1/2012	7:00:04 AM	SiCl4 pre valve closed
12/1/2012	7:00:04 AM	SiCl4 post valve closed
12/1/2012	7:00:04 AM	Main Vac valve closed
12/1/2012	7:00:04 AM	Bypass valve closed
12/1/2012	7:00:04 AM	Bubbler valve closed
12/1/2012	7:00:04 AM	Helium MFC set to  0.000000
12/1/2012	7:00:04 AM	H2 MFC set to  0.000000
12/1/2012	7:00:04 AM	BCl3 MFC set to  0.000000
12/1/2012	7:00:04 AM	PH3 MFC set to  0.000000
12/1/2012	7:00:04 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:00:04 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:00:04 AM	Tube furnace set to 150
12/1/2012	7:00:07 AM	Helium valve closed
12/1/2012	7:00:07 AM	BCl3 valve closed
12/1/2012	7:00:07 AM	PH3 valve closed
12/1/2012	7:00:07 AM	SiCl4 pre valve closed
12/1/2012	7:00:07 AM	SiCl4 post valve closed
12/1/2012	7:00:07 AM	Main Vac valve closed
12/1/2012	7:00:07 AM	Bypass valve closed
12/1/2012	7:00:07 AM	Bubbler valve closed
12/1/2012	7:00:07 AM	H2 valve opened
12/1/2012	7:00:07 AM	Helium MFC set to  0.000000
12/1/2012	7:00:07 AM	H2 MFC set to  500.000000
12/1/2012	7:00:07 AM	BCl3 MFC set to  0.000000
12/1/2012	7:00:07 AM	PH3 MFC set to  0.000000
12/1/2012	7:00:07 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:00:07 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:00:08 AM	Tube furnace set to 150
12/1/2012	7:01:20 AM	Helium valve closed
12/1/2012	7:01:20 AM	BCl3 valve closed
12/1/2012	7:01:20 AM	PH3 valve closed
12/1/2012	7:01:20 AM	SiCl4 pre valve closed
12/1/2012	7:01:20 AM	SiCl4 post valve closed
12/1/2012	7:01:20 AM	Main Vac valve closed
12/1/2012	7:01:20 AM	Bypass valve closed
12/1/2012	7:01:20 AM	H2 valve opened
12/1/2012	7:01:20 AM	Bubbler valve opened
12/1/2012	7:01:20 AM	Helium MFC set to  0.000000
12/1/2012	7:01:20 AM	H2 MFC set to  500.000000
12/1/2012	7:01:20 AM	BCl3 MFC set to  0.000000
12/1/2012	7:01:20 AM	PH3 MFC set to  0.000000
12/1/2012	7:01:20 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:01:20 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:01:20 AM	Tube furnace set to 150
12/1/2012	7:01:21 AM	Helium valve closed
12/1/2012	7:01:21 AM	BCl3 valve closed
12/1/2012	7:01:21 AM	PH3 valve closed
12/1/2012	7:01:21 AM	SiCl4 pre valve closed
12/1/2012	7:01:21 AM	SiCl4 post valve closed
12/1/2012	7:01:21 AM	Main Vac valve closed
12/1/2012	7:01:21 AM	Bypass valve closed
12/1/2012	7:01:21 AM	H2 valve opened
12/1/2012	7:01:21 AM	Bubbler valve opened
12/1/2012	7:01:21 AM	Helium MFC set to  0.000000
12/1/2012	7:01:21 AM	H2 MFC set to  500.000000
12/1/2012	7:01:21 AM	BCl3 MFC set to  0.000000
12/1/2012	7:01:21 AM	PH3 MFC set to  0.000000
12/1/2012	7:01:21 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:01:21 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:01:21 AM	Tube furnace set to 1000
12/1/2012	7:21:21 AM	Helium valve closed
12/1/2012	7:21:21 AM	PH3 valve closed
12/1/2012	7:21:21 AM	Main Vac valve closed
12/1/2012	7:21:21 AM	Bypass valve closed
12/1/2012	7:21:21 AM	H2 valve opened
12/1/2012	7:21:21 AM	BCl3 valve opened
12/1/2012	7:21:21 AM	SiCl4 pre valve opened
12/1/2012	7:21:21 AM	SiCl4 post valve opened
12/1/2012	7:21:21 AM	Bubbler valve opened
12/1/2012	7:21:21 AM	Helium MFC set to  0.000000
12/1/2012	7:21:21 AM	H2 MFC set to  450.000000
12/1/2012	7:21:21 AM	BCl3 MFC set to  1.300000
12/1/2012	7:21:21 AM	PH3 MFC set to  0.000000
12/1/2012	7:21:21 AM	SiCl4 MFC set to  50.000000
12/1/2012	7:21:21 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:21:22 AM	Tube furnace set to 1000
12/1/2012	7:36:22 AM	Helium valve closed
12/1/2012	7:36:22 AM	BCl3 valve closed
12/1/2012	7:36:22 AM	Main Vac valve closed
12/1/2012	7:36:22 AM	Bypass valve closed
12/1/2012	7:36:22 AM	H2 valve opened
12/1/2012	7:36:22 AM	PH3 valve opened
12/1/2012	7:36:22 AM	SiCl4 pre valve opened
12/1/2012	7:36:22 AM	SiCl4 post valve opened
12/1/2012	7:36:22 AM	Bubbler valve opened
12/1/2012	7:36:22 AM	Helium MFC set to  0.000000
12/1/2012	7:36:22 AM	H2 MFC set to  450.000000
12/1/2012	7:36:22 AM	BCl3 MFC set to  0.000000
12/1/2012	7:36:22 AM	PH3 MFC set to  20.000000
12/1/2012	7:36:22 AM	SiCl4 MFC set to  50.000000
12/1/2012	7:36:22 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:36:22 AM	Tube furnace set to 1000
12/1/2012	7:41:22 AM	Helium valve closed
12/1/2012	7:41:22 AM	BCl3 valve closed
12/1/2012	7:41:22 AM	PH3 valve closed
12/1/2012	7:41:22 AM	SiCl4 pre valve closed
12/1/2012	7:41:22 AM	SiCl4 post valve closed
12/1/2012	7:41:22 AM	Main Vac valve closed
12/1/2012	7:41:22 AM	Bypass valve closed
12/1/2012	7:41:22 AM	H2 valve opened
12/1/2012	7:41:22 AM	Bubbler valve opened
12/1/2012	7:41:22 AM	Helium MFC set to  0.000000
12/1/2012	7:41:22 AM	H2 MFC set to  500.000000
12/1/2012	7:41:22 AM	BCl3 MFC set to  0.000000
12/1/2012	7:41:22 AM	PH3 MFC set to  0.000000
12/1/2012	7:41:22 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:41:22 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:41:22 AM	Tube furnace set to 950
12/1/2012	7:44:22 AM	Helium valve closed
12/1/2012	7:44:22 AM	BCl3 valve closed
12/1/2012	7:44:22 AM	PH3 valve closed
12/1/2012	7:44:22 AM	SiCl4 pre valve closed
12/1/2012	7:44:22 AM	SiCl4 post valve closed
12/1/2012	7:44:22 AM	Main Vac valve closed
12/1/2012	7:44:22 AM	Bypass valve closed
12/1/2012	7:44:22 AM	H2 valve opened
12/1/2012	7:44:22 AM	Bubbler valve opened
12/1/2012	7:44:22 AM	Helium MFC set to  0.000000
12/1/2012	7:44:22 AM	H2 MFC set to  500.000000
12/1/2012	7:44:22 AM	BCl3 MFC set to  0.000000
12/1/2012	7:44:22 AM	PH3 MFC set to  0.000000
12/1/2012	7:44:22 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:44:22 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:44:22 AM	Tube furnace set to 900
12/1/2012	7:47:22 AM	Helium valve closed
12/1/2012	7:47:22 AM	BCl3 valve closed
12/1/2012	7:47:22 AM	PH3 valve closed
12/1/2012	7:47:22 AM	SiCl4 pre valve closed
12/1/2012	7:47:22 AM	SiCl4 post valve closed
12/1/2012	7:47:22 AM	Main Vac valve closed
12/1/2012	7:47:22 AM	Bypass valve closed
12/1/2012	7:47:22 AM	H2 valve opened
12/1/2012	7:47:22 AM	Bubbler valve opened
12/1/2012	7:47:22 AM	Helium MFC set to  0.000000
12/1/2012	7:47:22 AM	H2 MFC set to  500.000000
12/1/2012	7:47:22 AM	BCl3 MFC set to  0.000000
12/1/2012	7:47:22 AM	PH3 MFC set to  0.000000
12/1/2012	7:47:22 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:47:22 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:47:23 AM	Tube furnace set to 850
12/1/2012	7:50:23 AM	Helium valve closed
12/1/2012	7:50:23 AM	BCl3 valve closed
12/1/2012	7:50:23 AM	PH3 valve closed
12/1/2012	7:50:23 AM	SiCl4 pre valve closed
12/1/2012	7:50:23 AM	SiCl4 post valve closed
12/1/2012	7:50:23 AM	Main Vac valve closed
12/1/2012	7:50:23 AM	Bypass valve closed
12/1/2012	7:50:23 AM	H2 valve opened
12/1/2012	7:50:23 AM	Bubbler valve opened
12/1/2012	7:50:23 AM	Helium MFC set to  0.000000
12/1/2012	7:50:23 AM	H2 MFC set to  500.000000
12/1/2012	7:50:23 AM	BCl3 MFC set to  0.000000
12/1/2012	7:50:23 AM	PH3 MFC set to  0.000000
12/1/2012	7:50:23 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:50:23 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:50:23 AM	Tube furnace set to 800
12/1/2012	7:53:23 AM	Helium valve closed
12/1/2012	7:53:23 AM	BCl3 valve closed
12/1/2012	7:53:23 AM	PH3 valve closed
12/1/2012	7:53:23 AM	SiCl4 pre valve closed
12/1/2012	7:53:23 AM	SiCl4 post valve closed
12/1/2012	7:53:23 AM	Main Vac valve closed
12/1/2012	7:53:23 AM	Bypass valve closed
12/1/2012	7:53:23 AM	H2 valve opened
12/1/2012	7:53:23 AM	Bubbler valve opened
12/1/2012	7:53:23 AM	Helium MFC set to  0.000000
12/1/2012	7:53:23 AM	H2 MFC set to  500.000000
12/1/2012	7:53:23 AM	BCl3 MFC set to  0.000000
12/1/2012	7:53:23 AM	PH3 MFC set to  0.000000
12/1/2012	7:53:23 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:53:23 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:53:23 AM	Tube furnace set to 750
12/1/2012	7:56:23 AM	H2 valve closed
12/1/2012	7:56:23 AM	BCl3 valve closed
12/1/2012	7:56:23 AM	PH3 valve closed
12/1/2012	7:56:23 AM	SiCl4 pre valve closed
12/1/2012	7:56:23 AM	SiCl4 post valve closed
12/1/2012	7:56:23 AM	Main Vac valve closed
12/1/2012	7:56:23 AM	Bypass valve closed
12/1/2012	7:56:23 AM	Helium valve opened
12/1/2012	7:56:23 AM	Bubbler valve opened
12/1/2012	7:56:23 AM	Helium MFC set to  500.000000
12/1/2012	7:56:23 AM	H2 MFC set to  0.000000
12/1/2012	7:56:23 AM	BCl3 MFC set to  0.000000
12/1/2012	7:56:23 AM	PH3 MFC set to  0.000000
12/1/2012	7:56:23 AM	SiCl4 MFC set to  0.000000
12/1/2012	7:56:23 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	7:56:23 AM	Tube furnace set to 0
12/1/2012	8:16:23 AM	Helium valve closed
12/1/2012	8:16:23 AM	H2 valve closed
12/1/2012	8:16:23 AM	BCl3 valve closed
12/1/2012	8:16:23 AM	PH3 valve closed
12/1/2012	8:16:23 AM	SiCl4 pre valve closed
12/1/2012	8:16:23 AM	SiCl4 post valve closed
12/1/2012	8:16:23 AM	Main Vac valve closed
12/1/2012	8:16:23 AM	Bypass valve closed
12/1/2012	8:16:23 AM	Bubbler valve closed
12/1/2012	8:16:23 AM	Helium MFC set to  0.000000
12/1/2012	8:16:23 AM	H2 MFC set to  0.000000
12/1/2012	8:16:23 AM	BCl3 MFC set to  0.000000
12/1/2012	8:16:24 AM	PH3 MFC set to  0.000000
12/1/2012	8:16:24 AM	SiCl4 MFC set to  0.000000
12/1/2012	8:16:24 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:16:24 AM	Tube furnace set to 0
12/1/2012	8:46:24 AM	Helium valve closed
12/1/2012	8:46:24 AM	H2 valve closed
12/1/2012	8:46:24 AM	BCl3 valve closed
12/1/2012	8:46:24 AM	PH3 valve closed
12/1/2012	8:46:24 AM	SiCl4 pre valve closed
12/1/2012	8:46:24 AM	SiCl4 post valve closed
12/1/2012	8:46:24 AM	Main Vac valve closed
12/1/2012	8:46:24 AM	Bubbler valve closed
12/1/2012	8:46:24 AM	Bypass valve opened
12/1/2012	8:46:24 AM	Helium MFC set to  0.000000
12/1/2012	8:46:24 AM	H2 MFC set to  0.000000
12/1/2012	8:46:24 AM	BCl3 MFC set to  0.000000
12/1/2012	8:46:24 AM	PH3 MFC set to  0.000000
12/1/2012	8:46:24 AM	SiCl4 MFC set to  0.000000
12/1/2012	8:46:24 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:46:24 AM	Tube furnace set to 0
12/1/2012	8:47:24 AM	Helium valve closed
12/1/2012	8:47:24 AM	H2 valve closed
12/1/2012	8:47:24 AM	BCl3 valve closed
12/1/2012	8:47:24 AM	PH3 valve closed
12/1/2012	8:47:24 AM	SiCl4 pre valve closed
12/1/2012	8:47:24 AM	SiCl4 post valve closed
12/1/2012	8:47:24 AM	Main Vac valve closed
12/1/2012	8:47:24 AM	Bubbler valve closed
12/1/2012	8:47:24 AM	Bypass valve opened
12/1/2012	8:47:24 AM	Helium MFC set to  0.000000
12/1/2012	8:47:24 AM	H2 MFC set to  0.000000
12/1/2012	8:47:24 AM	BCl3 MFC set to  0.000000
12/1/2012	8:47:24 AM	PH3 MFC set to  0.000000
12/1/2012	8:47:24 AM	SiCl4 MFC set to  0.000000
12/1/2012	8:47:24 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:47:24 AM	Tube furnace set to 0
12/1/2012	8:48:24 AM	Helium valve closed
12/1/2012	8:48:24 AM	H2 valve closed
12/1/2012	8:48:24 AM	BCl3 valve closed
12/1/2012	8:48:24 AM	PH3 valve closed
12/1/2012	8:48:24 AM	SiCl4 pre valve closed
12/1/2012	8:48:24 AM	SiCl4 post valve closed
12/1/2012	8:48:24 AM	Bypass valve closed
12/1/2012	8:48:24 AM	Bubbler valve closed
12/1/2012	8:48:24 AM	Main Vac valve opened
12/1/2012	8:48:24 AM	Helium MFC set to  0.000000
12/1/2012	8:48:24 AM	H2 MFC set to  0.000000
12/1/2012	8:48:24 AM	BCl3 MFC set to  0.000000
12/1/2012	8:48:24 AM	PH3 MFC set to  0.000000
12/1/2012	8:48:24 AM	SiCl4 MFC set to  0.000000
12/1/2012	8:48:24 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:48:24 AM	Tube furnace set to 0
12/1/2012	8:48:25 AM	Run finished at 8:48 AM
12/1/2012	10:46:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	10:46:47 AM	Recipe started at 10:46 AM
12/1/2012	10:46:47 AM	Helium valve closed
12/1/2012	10:46:47 AM	H2 valve closed
12/1/2012	10:46:47 AM	BCl3 valve closed
12/1/2012	10:46:47 AM	PH3 valve closed
12/1/2012	10:46:47 AM	SiCl4 pre valve closed
12/1/2012	10:46:47 AM	SiCl4 post valve closed
12/1/2012	10:46:47 AM	Main Vac valve closed
12/1/2012	10:46:47 AM	Bypass valve closed
12/1/2012	10:46:47 AM	Bubbler valve closed
12/1/2012	10:46:47 AM	Helium MFC set to  0.000000
12/1/2012	10:46:47 AM	H2 MFC set to  0.000000
12/1/2012	10:46:47 AM	BCl3 MFC set to  0.000000
12/1/2012	10:46:47 AM	PH3 MFC set to  0.000000
12/1/2012	10:46:47 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:46:47 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:46:47 AM	Tube furnace set to 0
12/1/2012	10:46:50 AM	H2 valve closed
12/1/2012	10:46:50 AM	BCl3 valve closed
12/1/2012	10:46:50 AM	PH3 valve closed
12/1/2012	10:46:50 AM	SiCl4 pre valve closed
12/1/2012	10:46:50 AM	SiCl4 post valve closed
12/1/2012	10:46:50 AM	Main Vac valve closed
12/1/2012	10:46:50 AM	Bypass valve closed
12/1/2012	10:46:50 AM	Bubbler valve closed
12/1/2012	10:46:50 AM	Helium valve opened
12/1/2012	10:46:50 AM	Helium MFC set to  500.000000
12/1/2012	10:46:50 AM	H2 MFC set to  0.000000
12/1/2012	10:46:50 AM	BCl3 MFC set to  0.000000
12/1/2012	10:46:50 AM	PH3 MFC set to  0.000000
12/1/2012	10:46:50 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:46:50 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:46:51 AM	Tube furnace set to 0
12/1/2012	10:48:03 AM	Helium valve closed
12/1/2012	10:48:03 AM	H2 valve closed
12/1/2012	10:48:03 AM	BCl3 valve closed
12/1/2012	10:48:03 AM	PH3 valve closed
12/1/2012	10:48:03 AM	SiCl4 pre valve closed
12/1/2012	10:48:03 AM	SiCl4 post valve closed
12/1/2012	10:48:03 AM	Main Vac valve closed
12/1/2012	10:48:03 AM	Bypass valve closed
12/1/2012	10:48:03 AM	Bubbler valve closed
12/1/2012	10:48:03 AM	Helium MFC set to  0.000000
12/1/2012	10:48:03 AM	H2 MFC set to  0.000000
12/1/2012	10:48:03 AM	BCl3 MFC set to  0.000000
12/1/2012	10:48:03 AM	PH3 MFC set to  0.000000
12/1/2012	10:48:03 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:48:03 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:48:03 AM	Tube furnace set to 0
12/1/2012	10:48:04 AM	Run finished at 10:48 AM
12/1/2012	10:48:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	10:54:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2012	10:54:17 AM	Recipe started at 10:54 AM
12/1/2012	10:54:17 AM	Helium valve closed
12/1/2012	10:54:17 AM	H2 valve closed
12/1/2012	10:54:17 AM	BCl3 valve closed
12/1/2012	10:54:17 AM	PH3 valve closed
12/1/2012	10:54:17 AM	SiCl4 pre valve closed
12/1/2012	10:54:17 AM	SiCl4 post valve closed
12/1/2012	10:54:17 AM	Main Vac valve closed
12/1/2012	10:54:17 AM	Bubbler valve closed
12/1/2012	10:54:17 AM	Bypass valve opened
12/1/2012	10:54:17 AM	Helium MFC set to  0.000000
12/1/2012	10:54:17 AM	H2 MFC set to  0.000000
12/1/2012	10:54:17 AM	BCl3 MFC set to  0.000000
12/1/2012	10:54:17 AM	PH3 MFC set to  0.000000
12/1/2012	10:54:17 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:54:17 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:54:17 AM	Tube furnace set to 0
12/1/2012	10:55:41 AM	Helium valve closed
12/1/2012	10:55:41 AM	H2 valve closed
12/1/2012	10:55:41 AM	BCl3 valve closed
12/1/2012	10:55:41 AM	PH3 valve closed
12/1/2012	10:55:41 AM	SiCl4 pre valve closed
12/1/2012	10:55:41 AM	SiCl4 post valve closed
12/1/2012	10:55:41 AM	Main Vac valve closed
12/1/2012	10:55:41 AM	Bubbler valve closed
12/1/2012	10:55:41 AM	Bypass valve opened
12/1/2012	10:55:41 AM	Helium MFC set to  0.000000
12/1/2012	10:55:41 AM	H2 MFC set to  0.000000
12/1/2012	10:55:41 AM	BCl3 MFC set to  0.000000
12/1/2012	10:55:41 AM	PH3 MFC set to  0.000000
12/1/2012	10:55:41 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:55:41 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:55:41 AM	Tube furnace set to 0
12/1/2012	10:56:41 AM	Helium valve closed
12/1/2012	10:56:41 AM	H2 valve closed
12/1/2012	10:56:41 AM	BCl3 valve closed
12/1/2012	10:56:41 AM	PH3 valve closed
12/1/2012	10:56:41 AM	SiCl4 pre valve closed
12/1/2012	10:56:41 AM	SiCl4 post valve closed
12/1/2012	10:56:41 AM	Bypass valve closed
12/1/2012	10:56:41 AM	Bubbler valve closed
12/1/2012	10:56:41 AM	Main Vac valve opened
12/1/2012	10:56:41 AM	Helium MFC set to  0.000000
12/1/2012	10:56:41 AM	H2 MFC set to  0.000000
12/1/2012	10:56:41 AM	BCl3 MFC set to  0.000000
12/1/2012	10:56:41 AM	PH3 MFC set to  0.000000
12/1/2012	10:56:41 AM	SiCl4 MFC set to  0.000000
12/1/2012	10:56:41 AM	Bypass solenoid MFC set to  0.000000
12/1/2012	10:56:41 AM	Tube furnace set to 0
12/1/2012	10:56:42 AM	Run finished at 10:56 AM
12/1/2012	10:56:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2012	2:40:55 PM	Main Vac valve closed
12/1/2012	2:41:11 PM	Main Vac valve opened
12/1/2012	2:42:49 PM	Recipe started at 2:42 PM
12/1/2012	2:42:49 PM	Helium valve closed
12/1/2012	2:42:49 PM	H2 valve closed
12/1/2012	2:42:49 PM	BCl3 valve closed
12/1/2012	2:42:49 PM	PH3 valve closed
12/1/2012	2:42:49 PM	SiCl4 pre valve closed
12/1/2012	2:42:49 PM	SiCl4 post valve closed
12/1/2012	2:42:49 PM	Main Vac valve closed
12/1/2012	2:42:49 PM	Bypass valve closed
12/1/2012	2:42:50 PM	Bubbler valve closed
12/1/2012	2:42:50 PM	Helium MFC set to  0.000000
12/1/2012	2:42:50 PM	H2 MFC set to  0.000000
12/1/2012	2:42:50 PM	BCl3 MFC set to  0.000000
12/1/2012	2:42:50 PM	PH3 MFC set to  0.000000
12/1/2012	2:42:50 PM	SiCl4 MFC set to  0.000000
12/1/2012	2:42:50 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	2:42:50 PM	Tube furnace set to 0
12/1/2012	2:42:53 PM	Helium valve closed
12/1/2012	2:42:53 PM	BCl3 valve closed
12/1/2012	2:42:53 PM	PH3 valve closed
12/1/2012	2:42:53 PM	SiCl4 pre valve closed
12/1/2012	2:42:53 PM	SiCl4 post valve closed
12/1/2012	2:42:53 PM	Main Vac valve closed
12/1/2012	2:42:53 PM	Bypass valve closed
12/1/2012	2:42:53 PM	Bubbler valve closed
12/1/2012	2:42:53 PM	H2 valve opened
12/1/2012	2:42:53 PM	Helium MFC set to  0.000000
12/1/2012	2:42:53 PM	H2 MFC set to  500.000000
12/1/2012	2:42:53 PM	BCl3 MFC set to  0.000000
12/1/2012	2:42:53 PM	PH3 MFC set to  0.000000
12/1/2012	2:42:53 PM	SiCl4 MFC set to  0.000000
12/1/2012	2:42:53 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	2:42:53 PM	Tube furnace set to 0
12/1/2012	2:44:10 PM	Helium valve closed
12/1/2012	2:44:10 PM	BCl3 valve closed
12/1/2012	2:44:10 PM	PH3 valve closed
12/1/2012	2:44:10 PM	SiCl4 pre valve closed
12/1/2012	2:44:10 PM	SiCl4 post valve closed
12/1/2012	2:44:10 PM	Main Vac valve closed
12/1/2012	2:44:10 PM	Bypass valve closed
12/1/2012	2:44:10 PM	H2 valve opened
12/1/2012	2:44:10 PM	Bubbler valve opened
12/1/2012	2:44:10 PM	Helium MFC set to  0.000000
12/1/2012	2:44:10 PM	H2 MFC set to  500.000000
12/1/2012	2:44:10 PM	BCl3 MFC set to  0.000000
12/1/2012	2:44:10 PM	PH3 MFC set to  0.000000
12/1/2012	2:44:10 PM	SiCl4 MFC set to  0.000000
12/1/2012	2:44:10 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	2:44:10 PM	Tube furnace set to 0
12/1/2012	2:44:11 PM	Helium valve closed
12/1/2012	2:44:11 PM	BCl3 valve closed
12/1/2012	2:44:11 PM	PH3 valve closed
12/1/2012	2:44:11 PM	SiCl4 pre valve closed
12/1/2012	2:44:11 PM	SiCl4 post valve closed
12/1/2012	2:44:11 PM	Main Vac valve closed
12/1/2012	2:44:11 PM	Bypass valve closed
12/1/2012	2:44:11 PM	H2 valve opened
12/1/2012	2:44:11 PM	Bubbler valve opened
12/1/2012	2:44:11 PM	Helium MFC set to  0.000000
12/1/2012	2:44:11 PM	H2 MFC set to  500.000000
12/1/2012	2:44:11 PM	BCl3 MFC set to  0.000000
12/1/2012	2:44:11 PM	PH3 MFC set to  0.000000
12/1/2012	2:44:11 PM	SiCl4 MFC set to  0.000000
12/1/2012	2:44:11 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	2:44:11 PM	Tube furnace set to 1000
12/1/2012	3:04:11 PM	Helium valve closed
12/1/2012	3:04:11 PM	PH3 valve closed
12/1/2012	3:04:11 PM	Main Vac valve closed
12/1/2012	3:04:11 PM	Bypass valve closed
12/1/2012	3:04:11 PM	H2 valve opened
12/1/2012	3:04:11 PM	BCl3 valve opened
12/1/2012	3:04:11 PM	SiCl4 pre valve opened
12/1/2012	3:04:11 PM	SiCl4 post valve opened
12/1/2012	3:04:11 PM	Bubbler valve opened
12/1/2012	3:04:11 PM	Helium MFC set to  0.000000
12/1/2012	3:04:11 PM	H2 MFC set to  450.000000
12/1/2012	3:04:11 PM	BCl3 MFC set to  1.300000
12/1/2012	3:04:11 PM	PH3 MFC set to  0.000000
12/1/2012	3:04:11 PM	SiCl4 MFC set to  50.000000
12/1/2012	3:04:11 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:04:12 PM	Tube furnace set to 1000
12/1/2012	3:24:12 PM	Helium valve closed
12/1/2012	3:24:12 PM	BCl3 valve closed
12/1/2012	3:24:12 PM	PH3 valve closed
12/1/2012	3:24:12 PM	SiCl4 pre valve closed
12/1/2012	3:24:12 PM	SiCl4 post valve closed
12/1/2012	3:24:12 PM	Main Vac valve closed
12/1/2012	3:24:12 PM	Bypass valve closed
12/1/2012	3:24:12 PM	H2 valve opened
12/1/2012	3:24:12 PM	Bubbler valve opened
12/1/2012	3:24:12 PM	Helium MFC set to  0.000000
12/1/2012	3:24:12 PM	H2 MFC set to  500.000000
12/1/2012	3:24:12 PM	BCl3 MFC set to  0.000000
12/1/2012	3:24:12 PM	PH3 MFC set to  0.000000
12/1/2012	3:24:12 PM	SiCl4 MFC set to  0.000000
12/1/2012	3:24:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:24:12 PM	Tube furnace set to 900
12/1/2012	3:29:12 PM	Helium valve closed
12/1/2012	3:29:12 PM	BCl3 valve closed
12/1/2012	3:29:12 PM	PH3 valve closed
12/1/2012	3:29:12 PM	SiCl4 pre valve closed
12/1/2012	3:29:12 PM	SiCl4 post valve closed
12/1/2012	3:29:12 PM	Main Vac valve closed
12/1/2012	3:29:12 PM	Bypass valve closed
12/1/2012	3:29:12 PM	H2 valve opened
12/1/2012	3:29:12 PM	Bubbler valve opened
12/1/2012	3:29:12 PM	Helium MFC set to  0.000000
12/1/2012	3:29:12 PM	H2 MFC set to  500.000000
12/1/2012	3:29:12 PM	BCl3 MFC set to  0.000000
12/1/2012	3:29:12 PM	PH3 MFC set to  0.000000
12/1/2012	3:29:12 PM	SiCl4 MFC set to  0.000000
12/1/2012	3:29:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:29:12 PM	Tube furnace set to 800
12/1/2012	3:34:12 PM	Helium valve closed
12/1/2012	3:34:12 PM	BCl3 valve closed
12/1/2012	3:34:12 PM	PH3 valve closed
12/1/2012	3:34:12 PM	SiCl4 pre valve closed
12/1/2012	3:34:12 PM	SiCl4 post valve closed
12/1/2012	3:34:12 PM	Main Vac valve closed
12/1/2012	3:34:12 PM	Bypass valve closed
12/1/2012	3:34:12 PM	H2 valve opened
12/1/2012	3:34:12 PM	Bubbler valve opened
12/1/2012	3:34:12 PM	Helium MFC set to  0.000000
12/1/2012	3:34:12 PM	H2 MFC set to  500.000000
12/1/2012	3:34:12 PM	BCl3 MFC set to  0.000000
12/1/2012	3:34:12 PM	PH3 MFC set to  0.000000
12/1/2012	3:34:12 PM	SiCl4 MFC set to  0.000000
12/1/2012	3:34:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:34:12 PM	Tube furnace set to 700
12/1/2012	3:39:12 PM	H2 valve closed
12/1/2012	3:39:12 PM	BCl3 valve closed
12/1/2012	3:39:12 PM	PH3 valve closed
12/1/2012	3:39:12 PM	SiCl4 pre valve closed
12/1/2012	3:39:12 PM	SiCl4 post valve closed
12/1/2012	3:39:12 PM	Main Vac valve closed
12/1/2012	3:39:12 PM	Bypass valve closed
12/1/2012	3:39:12 PM	Helium valve opened
12/1/2012	3:39:12 PM	Bubbler valve opened
12/1/2012	3:39:12 PM	Helium MFC set to  500.000000
12/1/2012	3:39:12 PM	H2 MFC set to  0.000000
12/1/2012	3:39:12 PM	BCl3 MFC set to  0.000000
12/1/2012	3:39:12 PM	PH3 MFC set to  0.000000
12/1/2012	3:39:12 PM	SiCl4 MFC set to  0.000000
12/1/2012	3:39:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:39:13 PM	Tube furnace set to 0
12/1/2012	3:59:13 PM	Helium valve closed
12/1/2012	3:59:13 PM	H2 valve closed
12/1/2012	3:59:13 PM	BCl3 valve closed
12/1/2012	3:59:13 PM	PH3 valve closed
12/1/2012	3:59:13 PM	SiCl4 pre valve closed
12/1/2012	3:59:13 PM	SiCl4 post valve closed
12/1/2012	3:59:13 PM	Main Vac valve closed
12/1/2012	3:59:13 PM	Bypass valve closed
12/1/2012	3:59:13 PM	Bubbler valve closed
12/1/2012	3:59:13 PM	Helium MFC set to  0.000000
12/1/2012	3:59:13 PM	H2 MFC set to  0.000000
12/1/2012	3:59:13 PM	BCl3 MFC set to  0.000000
12/1/2012	3:59:13 PM	PH3 MFC set to  0.000000
12/1/2012	3:59:13 PM	SiCl4 MFC set to  0.000000
12/1/2012	3:59:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	3:59:13 PM	Tube furnace set to 0
12/1/2012	3:59:14 PM	Run finished at 3:59 PM
12/1/2012	4:05:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	4:05:40 PM	Recipe started at 4:05 PM
12/1/2012	4:05:40 PM	Helium valve closed
12/1/2012	4:05:40 PM	H2 valve closed
12/1/2012	4:05:40 PM	BCl3 valve closed
12/1/2012	4:05:40 PM	PH3 valve closed
12/1/2012	4:05:40 PM	SiCl4 pre valve closed
12/1/2012	4:05:40 PM	SiCl4 post valve closed
12/1/2012	4:05:40 PM	Main Vac valve closed
12/1/2012	4:05:40 PM	Bypass valve closed
12/1/2012	4:05:40 PM	Bubbler valve closed
12/1/2012	4:05:40 PM	Helium MFC set to  0.000000
12/1/2012	4:05:40 PM	H2 MFC set to  0.000000
12/1/2012	4:05:40 PM	BCl3 MFC set to  0.000000
12/1/2012	4:05:40 PM	PH3 MFC set to  0.000000
12/1/2012	4:05:40 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:05:40 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:05:40 PM	Tube furnace set to 0
12/1/2012	4:05:43 PM	H2 valve closed
12/1/2012	4:05:43 PM	BCl3 valve closed
12/1/2012	4:05:43 PM	PH3 valve closed
12/1/2012	4:05:43 PM	SiCl4 pre valve closed
12/1/2012	4:05:43 PM	SiCl4 post valve closed
12/1/2012	4:05:43 PM	Main Vac valve closed
12/1/2012	4:05:43 PM	Bypass valve closed
12/1/2012	4:05:43 PM	Bubbler valve closed
12/1/2012	4:05:43 PM	Helium valve opened
12/1/2012	4:05:43 PM	Helium MFC set to  500.000000
12/1/2012	4:05:43 PM	H2 MFC set to  0.000000
12/1/2012	4:05:43 PM	BCl3 MFC set to  0.000000
12/1/2012	4:05:43 PM	PH3 MFC set to  0.000000
12/1/2012	4:05:43 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:05:43 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:05:43 PM	Tube furnace set to 0
12/1/2012	4:05:45 PM	Helium valve closed
12/1/2012	4:05:45 PM	H2 valve closed
12/1/2012	4:05:45 PM	BCl3 valve closed
12/1/2012	4:05:45 PM	PH3 valve closed
12/1/2012	4:05:45 PM	SiCl4 pre valve closed
12/1/2012	4:05:45 PM	SiCl4 post valve closed
12/1/2012	4:05:45 PM	Main Vac valve closed
12/1/2012	4:05:45 PM	Bypass valve closed
12/1/2012	4:05:45 PM	Bubbler valve closed
12/1/2012	4:05:45 PM	Helium MFC set to  0.000000
12/1/2012	4:05:45 PM	H2 MFC set to  0.000000
12/1/2012	4:05:45 PM	BCl3 MFC set to  0.000000
12/1/2012	4:05:45 PM	PH3 MFC set to  0.000000
12/1/2012	4:05:45 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:05:45 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:05:45 PM	Tube furnace set to 0
12/1/2012	4:05:46 PM	Run finished at 4:05 PM
12/1/2012	4:05:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	4:09:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2012	4:09:32 PM	Recipe started at 4:09 PM
12/1/2012	4:09:32 PM	Helium valve closed
12/1/2012	4:09:32 PM	H2 valve closed
12/1/2012	4:09:32 PM	BCl3 valve closed
12/1/2012	4:09:32 PM	PH3 valve closed
12/1/2012	4:09:32 PM	SiCl4 pre valve closed
12/1/2012	4:09:32 PM	SiCl4 post valve closed
12/1/2012	4:09:32 PM	Main Vac valve closed
12/1/2012	4:09:32 PM	Bubbler valve closed
12/1/2012	4:09:32 PM	Bypass valve opened
12/1/2012	4:09:32 PM	Helium MFC set to  0.000000
12/1/2012	4:09:32 PM	H2 MFC set to  0.000000
12/1/2012	4:09:32 PM	BCl3 MFC set to  0.000000
12/1/2012	4:09:32 PM	PH3 MFC set to  0.000000
12/1/2012	4:09:32 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:09:32 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:09:32 PM	Tube furnace set to 0
12/1/2012	4:10:47 PM	Helium valve closed
12/1/2012	4:10:47 PM	H2 valve closed
12/1/2012	4:10:47 PM	BCl3 valve closed
12/1/2012	4:10:47 PM	PH3 valve closed
12/1/2012	4:10:47 PM	SiCl4 pre valve closed
12/1/2012	4:10:47 PM	SiCl4 post valve closed
12/1/2012	4:10:47 PM	Main Vac valve closed
12/1/2012	4:10:47 PM	Bubbler valve closed
12/1/2012	4:10:47 PM	Bypass valve opened
12/1/2012	4:10:47 PM	Helium MFC set to  0.000000
12/1/2012	4:10:47 PM	H2 MFC set to  0.000000
12/1/2012	4:10:47 PM	BCl3 MFC set to  0.000000
12/1/2012	4:10:47 PM	PH3 MFC set to  0.000000
12/1/2012	4:10:47 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:10:47 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:10:47 PM	Tube furnace set to 0
12/1/2012	4:11:47 PM	Helium valve closed
12/1/2012	4:11:47 PM	H2 valve closed
12/1/2012	4:11:47 PM	BCl3 valve closed
12/1/2012	4:11:47 PM	PH3 valve closed
12/1/2012	4:11:47 PM	SiCl4 pre valve closed
12/1/2012	4:11:47 PM	SiCl4 post valve closed
12/1/2012	4:11:47 PM	Bypass valve closed
12/1/2012	4:11:47 PM	Bubbler valve closed
12/1/2012	4:11:47 PM	Main Vac valve opened
12/1/2012	4:11:47 PM	Helium MFC set to  0.000000
12/1/2012	4:11:47 PM	H2 MFC set to  0.000000
12/1/2012	4:11:47 PM	BCl3 MFC set to  0.000000
12/1/2012	4:11:47 PM	PH3 MFC set to  0.000000
12/1/2012	4:11:47 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:11:47 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:11:47 PM	Tube furnace set to 0
12/1/2012	4:11:48 PM	Run finished at 4:11 PM
12/1/2012	4:11:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2012	4:27:26 PM	Main Vac valve closed
12/1/2012	4:27:34 PM	Main Vac valve opened
12/1/2012	4:27:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/1/2012	4:27:48 PM	Recipe started at 4:27 PM
12/1/2012	4:27:48 PM	Helium valve closed
12/1/2012	4:27:48 PM	H2 valve closed
12/1/2012	4:27:48 PM	BCl3 valve closed
12/1/2012	4:27:48 PM	PH3 valve closed
12/1/2012	4:27:48 PM	SiCl4 pre valve closed
12/1/2012	4:27:48 PM	SiCl4 post valve closed
12/1/2012	4:27:48 PM	Main Vac valve closed
12/1/2012	4:27:48 PM	Bubbler valve closed
12/1/2012	4:27:48 PM	Bypass valve opened
12/1/2012	4:27:48 PM	Helium MFC set to  0.000000
12/1/2012	4:27:48 PM	H2 MFC set to  0.000000
12/1/2012	4:27:48 PM	BCl3 MFC set to  0.000000
12/1/2012	4:27:48 PM	PH3 MFC set to  0.000000
12/1/2012	4:27:48 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:27:48 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:27:49 PM	Tube furnace set to 0
12/1/2012	4:27:49 PM	Helium valve closed
12/1/2012	4:27:49 PM	H2 valve closed
12/1/2012	4:27:49 PM	BCl3 valve closed
12/1/2012	4:27:49 PM	PH3 valve closed
12/1/2012	4:27:49 PM	SiCl4 pre valve closed
12/1/2012	4:27:49 PM	SiCl4 post valve closed
12/1/2012	4:27:49 PM	Main Vac valve closed
12/1/2012	4:27:49 PM	Bubbler valve closed
12/1/2012	4:27:49 PM	Bypass valve opened
12/1/2012	4:27:49 PM	Helium MFC set to  0.000000
12/1/2012	4:27:49 PM	H2 MFC set to  0.000000
12/1/2012	4:27:49 PM	BCl3 MFC set to  0.000000
12/1/2012	4:27:49 PM	PH3 MFC set to  0.000000
12/1/2012	4:27:49 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:27:49 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:27:49 PM	Tube furnace set to 0
12/1/2012	4:28:19 PM	Helium valve closed
12/1/2012	4:28:19 PM	H2 valve closed
12/1/2012	4:28:19 PM	BCl3 valve closed
12/1/2012	4:28:19 PM	PH3 valve closed
12/1/2012	4:28:19 PM	SiCl4 pre valve closed
12/1/2012	4:28:19 PM	SiCl4 post valve closed
12/1/2012	4:28:19 PM	Bypass valve closed
12/1/2012	4:28:19 PM	Bubbler valve closed
12/1/2012	4:28:19 PM	Main Vac valve opened
12/1/2012	4:28:19 PM	Helium MFC set to  0.000000
12/1/2012	4:28:19 PM	H2 MFC set to  0.000000
12/1/2012	4:28:19 PM	BCl3 MFC set to  0.000000
12/1/2012	4:28:19 PM	PH3 MFC set to  0.000000
12/1/2012	4:28:19 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:28:19 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:28:19 PM	Tube furnace set to 0
12/1/2012	4:28:49 PM	H2 valve closed
12/1/2012	4:28:49 PM	BCl3 valve closed
12/1/2012	4:28:49 PM	PH3 valve closed
12/1/2012	4:28:49 PM	SiCl4 pre valve closed
12/1/2012	4:28:49 PM	SiCl4 post valve closed
12/1/2012	4:28:49 PM	Bypass valve closed
12/1/2012	4:28:49 PM	Bubbler valve closed
12/1/2012	4:28:49 PM	Helium valve opened
12/1/2012	4:28:49 PM	Main Vac valve opened
12/1/2012	4:28:49 PM	Helium MFC set to  20.000000
12/1/2012	4:28:49 PM	H2 MFC set to  0.000000
12/1/2012	4:28:49 PM	BCl3 MFC set to  0.000000
12/1/2012	4:28:49 PM	PH3 MFC set to  0.000000
12/1/2012	4:28:49 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:28:49 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:28:50 PM	Tube furnace set to 0
12/1/2012	4:29:20 PM	Helium valve closed
12/1/2012	4:29:20 PM	H2 valve closed
12/1/2012	4:29:20 PM	BCl3 valve closed
12/1/2012	4:29:20 PM	PH3 valve closed
12/1/2012	4:29:20 PM	SiCl4 pre valve closed
12/1/2012	4:29:20 PM	SiCl4 post valve closed
12/1/2012	4:29:20 PM	Bypass valve closed
12/1/2012	4:29:20 PM	Bubbler valve closed
12/1/2012	4:29:20 PM	Main Vac valve opened
12/1/2012	4:29:20 PM	Helium MFC set to  0.000000
12/1/2012	4:29:20 PM	H2 MFC set to  0.000000
12/1/2012	4:29:20 PM	BCl3 MFC set to  0.000000
12/1/2012	4:29:20 PM	PH3 MFC set to  0.000000
12/1/2012	4:29:20 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:29:20 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:29:20 PM	Tube furnace set to 0
12/1/2012	4:29:50 PM	H2 valve closed
12/1/2012	4:29:50 PM	BCl3 valve closed
12/1/2012	4:29:50 PM	PH3 valve closed
12/1/2012	4:29:50 PM	SiCl4 pre valve closed
12/1/2012	4:29:50 PM	SiCl4 post valve closed
12/1/2012	4:29:50 PM	Bypass valve closed
12/1/2012	4:29:50 PM	Bubbler valve closed
12/1/2012	4:29:50 PM	Helium valve opened
12/1/2012	4:29:50 PM	Main Vac valve opened
12/1/2012	4:29:50 PM	Helium MFC set to  20.000000
12/1/2012	4:29:50 PM	H2 MFC set to  0.000000
12/1/2012	4:29:50 PM	BCl3 MFC set to  0.000000
12/1/2012	4:29:50 PM	PH3 MFC set to  0.000000
12/1/2012	4:29:50 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:29:50 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:29:50 PM	Tube furnace set to 0
12/1/2012	4:30:20 PM	Helium valve closed
12/1/2012	4:30:20 PM	H2 valve closed
12/1/2012	4:30:20 PM	BCl3 valve closed
12/1/2012	4:30:20 PM	PH3 valve closed
12/1/2012	4:30:20 PM	SiCl4 pre valve closed
12/1/2012	4:30:20 PM	SiCl4 post valve closed
12/1/2012	4:30:20 PM	Bypass valve closed
12/1/2012	4:30:20 PM	Bubbler valve closed
12/1/2012	4:30:20 PM	Main Vac valve opened
12/1/2012	4:30:20 PM	Helium MFC set to  0.000000
12/1/2012	4:30:20 PM	H2 MFC set to  0.000000
12/1/2012	4:30:20 PM	BCl3 MFC set to  0.000000
12/1/2012	4:30:20 PM	PH3 MFC set to  0.000000
12/1/2012	4:30:20 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:30:20 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:30:20 PM	Tube furnace set to 0
12/1/2012	4:30:50 PM	H2 valve closed
12/1/2012	4:30:50 PM	BCl3 valve closed
12/1/2012	4:30:50 PM	PH3 valve closed
12/1/2012	4:30:50 PM	SiCl4 pre valve closed
12/1/2012	4:30:50 PM	SiCl4 post valve closed
12/1/2012	4:30:51 PM	Bypass valve closed
12/1/2012	4:30:51 PM	Bubbler valve closed
12/1/2012	4:30:51 PM	Helium valve opened
12/1/2012	4:30:51 PM	Main Vac valve opened
12/1/2012	4:30:51 PM	Helium MFC set to  20.000000
12/1/2012	4:30:51 PM	H2 MFC set to  0.000000
12/1/2012	4:30:51 PM	BCl3 MFC set to  0.000000
12/1/2012	4:30:51 PM	PH3 MFC set to  0.000000
12/1/2012	4:30:51 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:30:51 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:30:51 PM	Tube furnace set to 0
12/1/2012	4:31:21 PM	Helium valve closed
12/1/2012	4:31:21 PM	H2 valve closed
12/1/2012	4:31:21 PM	BCl3 valve closed
12/1/2012	4:31:21 PM	PH3 valve closed
12/1/2012	4:31:21 PM	SiCl4 pre valve closed
12/1/2012	4:31:21 PM	SiCl4 post valve closed
12/1/2012	4:31:21 PM	Bypass valve closed
12/1/2012	4:31:21 PM	Bubbler valve closed
12/1/2012	4:31:21 PM	Main Vac valve opened
12/1/2012	4:31:21 PM	Helium MFC set to  0.000000
12/1/2012	4:31:21 PM	H2 MFC set to  0.000000
12/1/2012	4:31:21 PM	BCl3 MFC set to  0.000000
12/1/2012	4:31:21 PM	PH3 MFC set to  0.000000
12/1/2012	4:31:21 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:31:21 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:31:21 PM	Tube furnace set to 0
12/1/2012	4:31:51 PM	H2 valve closed
12/1/2012	4:31:51 PM	BCl3 valve closed
12/1/2012	4:31:51 PM	PH3 valve closed
12/1/2012	4:31:51 PM	SiCl4 pre valve closed
12/1/2012	4:31:51 PM	SiCl4 post valve closed
12/1/2012	4:31:51 PM	Bypass valve closed
12/1/2012	4:31:51 PM	Bubbler valve closed
12/1/2012	4:31:51 PM	Helium valve opened
12/1/2012	4:31:51 PM	Main Vac valve opened
12/1/2012	4:31:51 PM	Helium MFC set to  20.000000
12/1/2012	4:31:51 PM	H2 MFC set to  0.000000
12/1/2012	4:31:51 PM	BCl3 MFC set to  0.000000
12/1/2012	4:31:51 PM	PH3 MFC set to  0.000000
12/1/2012	4:31:51 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:31:51 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:31:51 PM	Tube furnace set to 0
12/1/2012	4:32:21 PM	Helium valve closed
12/1/2012	4:32:21 PM	H2 valve closed
12/1/2012	4:32:21 PM	BCl3 valve closed
12/1/2012	4:32:21 PM	PH3 valve closed
12/1/2012	4:32:21 PM	SiCl4 pre valve closed
12/1/2012	4:32:21 PM	SiCl4 post valve closed
12/1/2012	4:32:21 PM	Bypass valve closed
12/1/2012	4:32:21 PM	Bubbler valve closed
12/1/2012	4:32:21 PM	Main Vac valve opened
12/1/2012	4:32:21 PM	Helium MFC set to  0.000000
12/1/2012	4:32:21 PM	H2 MFC set to  0.000000
12/1/2012	4:32:21 PM	BCl3 MFC set to  0.000000
12/1/2012	4:32:21 PM	PH3 MFC set to  0.000000
12/1/2012	4:32:21 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:32:21 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:32:22 PM	Tube furnace set to 0
12/1/2012	4:32:52 PM	H2 valve closed
12/1/2012	4:32:52 PM	BCl3 valve closed
12/1/2012	4:32:52 PM	PH3 valve closed
12/1/2012	4:32:52 PM	SiCl4 pre valve closed
12/1/2012	4:32:52 PM	SiCl4 post valve closed
12/1/2012	4:32:52 PM	Bypass valve closed
12/1/2012	4:32:52 PM	Bubbler valve closed
12/1/2012	4:32:52 PM	Helium valve opened
12/1/2012	4:32:52 PM	Main Vac valve opened
12/1/2012	4:32:52 PM	Helium MFC set to  20.000000
12/1/2012	4:32:52 PM	H2 MFC set to  0.000000
12/1/2012	4:32:52 PM	BCl3 MFC set to  0.000000
12/1/2012	4:32:52 PM	PH3 MFC set to  0.000000
12/1/2012	4:32:52 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:32:52 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:32:52 PM	Tube furnace set to 0
12/1/2012	4:33:22 PM	Helium valve closed
12/1/2012	4:33:22 PM	H2 valve closed
12/1/2012	4:33:22 PM	BCl3 valve closed
12/1/2012	4:33:22 PM	PH3 valve closed
12/1/2012	4:33:22 PM	SiCl4 pre valve closed
12/1/2012	4:33:22 PM	SiCl4 post valve closed
12/1/2012	4:33:22 PM	Bypass valve closed
12/1/2012	4:33:22 PM	Bubbler valve closed
12/1/2012	4:33:22 PM	Main Vac valve opened
12/1/2012	4:33:22 PM	Helium MFC set to  0.000000
12/1/2012	4:33:22 PM	H2 MFC set to  0.000000
12/1/2012	4:33:22 PM	BCl3 MFC set to  0.000000
12/1/2012	4:33:22 PM	PH3 MFC set to  0.000000
12/1/2012	4:33:22 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:33:22 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:33:22 PM	Tube furnace set to 0
12/1/2012	4:33:52 PM	H2 valve closed
12/1/2012	4:33:52 PM	BCl3 valve closed
12/1/2012	4:33:52 PM	PH3 valve closed
12/1/2012	4:33:52 PM	SiCl4 pre valve closed
12/1/2012	4:33:52 PM	SiCl4 post valve closed
12/1/2012	4:33:52 PM	Bypass valve closed
12/1/2012	4:33:52 PM	Bubbler valve closed
12/1/2012	4:33:52 PM	Helium valve opened
12/1/2012	4:33:52 PM	Main Vac valve opened
12/1/2012	4:33:52 PM	Helium MFC set to  20.000000
12/1/2012	4:33:52 PM	H2 MFC set to  0.000000
12/1/2012	4:33:52 PM	BCl3 MFC set to  0.000000
12/1/2012	4:33:52 PM	PH3 MFC set to  0.000000
12/1/2012	4:33:52 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:33:52 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:33:52 PM	Tube furnace set to 0
12/1/2012	4:34:22 PM	Helium valve closed
12/1/2012	4:34:22 PM	H2 valve closed
12/1/2012	4:34:22 PM	BCl3 valve closed
12/1/2012	4:34:22 PM	PH3 valve closed
12/1/2012	4:34:22 PM	SiCl4 pre valve closed
12/1/2012	4:34:22 PM	SiCl4 post valve closed
12/1/2012	4:34:22 PM	Bypass valve closed
12/1/2012	4:34:22 PM	Bubbler valve closed
12/1/2012	4:34:22 PM	Main Vac valve opened
12/1/2012	4:34:22 PM	Helium MFC set to  0.000000
12/1/2012	4:34:22 PM	H2 MFC set to  0.000000
12/1/2012	4:34:22 PM	BCl3 MFC set to  0.000000
12/1/2012	4:34:22 PM	PH3 MFC set to  0.000000
12/1/2012	4:34:22 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:34:22 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:34:23 PM	Tube furnace set to 0
12/1/2012	4:34:53 PM	H2 valve closed
12/1/2012	4:34:53 PM	BCl3 valve closed
12/1/2012	4:34:53 PM	PH3 valve closed
12/1/2012	4:34:53 PM	SiCl4 pre valve closed
12/1/2012	4:34:53 PM	SiCl4 post valve closed
12/1/2012	4:34:53 PM	Bypass valve closed
12/1/2012	4:34:53 PM	Bubbler valve closed
12/1/2012	4:34:53 PM	Helium valve opened
12/1/2012	4:34:53 PM	Main Vac valve opened
12/1/2012	4:34:53 PM	Helium MFC set to  20.000000
12/1/2012	4:34:53 PM	H2 MFC set to  0.000000
12/1/2012	4:34:53 PM	BCl3 MFC set to  0.000000
12/1/2012	4:34:53 PM	PH3 MFC set to  0.000000
12/1/2012	4:34:53 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:34:53 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:34:53 PM	Tube furnace set to 0
12/1/2012	4:35:23 PM	Helium valve closed
12/1/2012	4:35:23 PM	H2 valve closed
12/1/2012	4:35:23 PM	BCl3 valve closed
12/1/2012	4:35:23 PM	PH3 valve closed
12/1/2012	4:35:23 PM	SiCl4 pre valve closed
12/1/2012	4:35:23 PM	SiCl4 post valve closed
12/1/2012	4:35:23 PM	Bypass valve closed
12/1/2012	4:35:23 PM	Bubbler valve closed
12/1/2012	4:35:23 PM	Main Vac valve opened
12/1/2012	4:35:23 PM	Helium MFC set to  0.000000
12/1/2012	4:35:23 PM	H2 MFC set to  0.000000
12/1/2012	4:35:23 PM	BCl3 MFC set to  0.000000
12/1/2012	4:35:23 PM	PH3 MFC set to  0.000000
12/1/2012	4:35:23 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:35:23 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:35:23 PM	Tube furnace set to 0
12/1/2012	4:35:53 PM	H2 valve closed
12/1/2012	4:35:53 PM	BCl3 valve closed
12/1/2012	4:35:53 PM	PH3 valve closed
12/1/2012	4:35:53 PM	SiCl4 pre valve closed
12/1/2012	4:35:53 PM	SiCl4 post valve closed
12/1/2012	4:35:53 PM	Bypass valve closed
12/1/2012	4:35:53 PM	Bubbler valve closed
12/1/2012	4:35:53 PM	Helium valve opened
12/1/2012	4:35:53 PM	Main Vac valve opened
12/1/2012	4:35:53 PM	Helium MFC set to  20.000000
12/1/2012	4:35:53 PM	H2 MFC set to  0.000000
12/1/2012	4:35:53 PM	BCl3 MFC set to  0.000000
12/1/2012	4:35:53 PM	PH3 MFC set to  0.000000
12/1/2012	4:35:53 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:35:53 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:35:53 PM	Tube furnace set to 0
12/1/2012	4:36:23 PM	Helium valve closed
12/1/2012	4:36:23 PM	H2 valve closed
12/1/2012	4:36:23 PM	BCl3 valve closed
12/1/2012	4:36:23 PM	PH3 valve closed
12/1/2012	4:36:23 PM	SiCl4 pre valve closed
12/1/2012	4:36:23 PM	SiCl4 post valve closed
12/1/2012	4:36:23 PM	Bypass valve closed
12/1/2012	4:36:23 PM	Bubbler valve closed
12/1/2012	4:36:23 PM	Main Vac valve opened
12/1/2012	4:36:23 PM	Helium MFC set to  0.000000
12/1/2012	4:36:23 PM	H2 MFC set to  0.000000
12/1/2012	4:36:23 PM	BCl3 MFC set to  0.000000
12/1/2012	4:36:23 PM	PH3 MFC set to  0.000000
12/1/2012	4:36:23 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:36:23 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:36:24 PM	Tube furnace set to 0
12/1/2012	4:36:40 PM	Run aborted at 4:36 PM
12/1/2012	4:36:40 PM	Helium valve closed
12/1/2012	4:36:40 PM	H2 valve closed
12/1/2012	4:36:40 PM	BCl3 valve closed
12/1/2012	4:36:40 PM	PH3 valve closed
12/1/2012	4:36:40 PM	SiCl4 pre valve closed
12/1/2012	4:36:40 PM	SiCl4 post valve closed
12/1/2012	4:36:40 PM	Bypass valve closed
12/1/2012	4:36:40 PM	Main Vac valve closed
12/1/2012	4:36:40 PM	Bubbler valve closed
12/1/2012	4:36:40 PM	Helium MFC set to  0.000000
12/1/2012	4:36:40 PM	H2 MFC set to  0.000000
12/1/2012	4:36:40 PM	BCl3 MFC set to  0.000000
12/1/2012	4:36:40 PM	PH3 MFC set to  0.000000
12/1/2012	4:36:40 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:36:40 PM	Tube furnace set to 0
12/1/2012	4:36:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/1/2012	4:37:53 PM	Recipe started at 4:37 PM
12/1/2012	4:37:54 PM	Helium valve closed
12/1/2012	4:37:54 PM	H2 valve closed
12/1/2012	4:37:54 PM	BCl3 valve closed
12/1/2012	4:37:54 PM	PH3 valve closed
12/1/2012	4:37:54 PM	SiCl4 pre valve closed
12/1/2012	4:37:54 PM	SiCl4 post valve closed
12/1/2012	4:37:54 PM	Bypass valve closed
12/1/2012	4:37:54 PM	Bubbler valve closed
12/1/2012	4:37:54 PM	Main Vac valve opened
12/1/2012	4:37:54 PM	Helium MFC set to  0.000000
12/1/2012	4:37:54 PM	H2 MFC set to  0.000000
12/1/2012	4:37:54 PM	BCl3 MFC set to  0.000000
12/1/2012	4:37:54 PM	PH3 MFC set to  0.000000
12/1/2012	4:37:54 PM	SiCl4 MFC set to  0.000000
12/1/2012	4:37:54 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	4:37:54 PM	Tube furnace set to 0
12/1/2012	5:07:54 PM	Helium valve closed
12/1/2012	5:07:54 PM	H2 valve closed
12/1/2012	5:07:54 PM	BCl3 valve closed
12/1/2012	5:07:54 PM	PH3 valve closed
12/1/2012	5:07:54 PM	SiCl4 pre valve closed
12/1/2012	5:07:54 PM	SiCl4 post valve closed
12/1/2012	5:07:54 PM	Main Vac valve closed
12/1/2012	5:07:54 PM	Bypass valve closed
12/1/2012	5:07:54 PM	Bubbler valve closed
12/1/2012	5:07:54 PM	Helium MFC set to  0.000000
12/1/2012	5:07:54 PM	H2 MFC set to  0.000000
12/1/2012	5:07:54 PM	BCl3 MFC set to  0.000000
12/1/2012	5:07:54 PM	PH3 MFC set to  0.000000
12/1/2012	5:07:54 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:07:54 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:07:54 PM	Tube furnace set to 0
12/1/2012	5:07:57 PM	Helium valve closed
12/1/2012	5:07:57 PM	BCl3 valve closed
12/1/2012	5:07:57 PM	PH3 valve closed
12/1/2012	5:07:57 PM	SiCl4 pre valve closed
12/1/2012	5:07:57 PM	SiCl4 post valve closed
12/1/2012	5:07:57 PM	Main Vac valve closed
12/1/2012	5:07:57 PM	Bypass valve closed
12/1/2012	5:07:57 PM	Bubbler valve closed
12/1/2012	5:07:57 PM	H2 valve opened
12/1/2012	5:07:57 PM	Helium MFC set to  0.000000
12/1/2012	5:07:57 PM	H2 MFC set to  500.000000
12/1/2012	5:07:57 PM	BCl3 MFC set to  0.000000
12/1/2012	5:07:57 PM	PH3 MFC set to  0.000000
12/1/2012	5:07:57 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:07:57 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:07:57 PM	Tube furnace set to 0
12/1/2012	5:09:12 PM	Helium valve closed
12/1/2012	5:09:12 PM	BCl3 valve closed
12/1/2012	5:09:12 PM	PH3 valve closed
12/1/2012	5:09:12 PM	SiCl4 pre valve closed
12/1/2012	5:09:12 PM	SiCl4 post valve closed
12/1/2012	5:09:12 PM	Main Vac valve closed
12/1/2012	5:09:12 PM	Bypass valve closed
12/1/2012	5:09:12 PM	H2 valve opened
12/1/2012	5:09:12 PM	Bubbler valve opened
12/1/2012	5:09:12 PM	Helium MFC set to  0.000000
12/1/2012	5:09:12 PM	H2 MFC set to  500.000000
12/1/2012	5:09:12 PM	BCl3 MFC set to  0.000000
12/1/2012	5:09:12 PM	PH3 MFC set to  0.000000
12/1/2012	5:09:12 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:09:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:09:12 PM	Tube furnace set to 0
12/1/2012	5:09:13 PM	Helium valve closed
12/1/2012	5:09:13 PM	BCl3 valve closed
12/1/2012	5:09:13 PM	PH3 valve closed
12/1/2012	5:09:13 PM	SiCl4 pre valve closed
12/1/2012	5:09:13 PM	SiCl4 post valve closed
12/1/2012	5:09:13 PM	Main Vac valve closed
12/1/2012	5:09:13 PM	Bypass valve closed
12/1/2012	5:09:13 PM	H2 valve opened
12/1/2012	5:09:13 PM	Bubbler valve opened
12/1/2012	5:09:13 PM	Helium MFC set to  0.000000
12/1/2012	5:09:13 PM	H2 MFC set to  500.000000
12/1/2012	5:09:13 PM	BCl3 MFC set to  0.000000
12/1/2012	5:09:13 PM	PH3 MFC set to  0.000000
12/1/2012	5:09:13 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:09:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:09:13 PM	Tube furnace set to 1000
12/1/2012	5:29:13 PM	Helium valve closed
12/1/2012	5:29:13 PM	PH3 valve closed
12/1/2012	5:29:13 PM	Main Vac valve closed
12/1/2012	5:29:13 PM	Bypass valve closed
12/1/2012	5:29:13 PM	H2 valve opened
12/1/2012	5:29:13 PM	BCl3 valve opened
12/1/2012	5:29:13 PM	SiCl4 pre valve opened
12/1/2012	5:29:13 PM	SiCl4 post valve opened
12/1/2012	5:29:13 PM	Bubbler valve opened
12/1/2012	5:29:13 PM	Helium MFC set to  0.000000
12/1/2012	5:29:13 PM	H2 MFC set to  450.000000
12/1/2012	5:29:13 PM	BCl3 MFC set to  1.300000
12/1/2012	5:29:13 PM	PH3 MFC set to  0.000000
12/1/2012	5:29:13 PM	SiCl4 MFC set to  50.000000
12/1/2012	5:29:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:29:13 PM	Tube furnace set to 1000
12/1/2012	5:49:13 PM	Helium valve closed
12/1/2012	5:49:13 PM	BCl3 valve closed
12/1/2012	5:49:13 PM	PH3 valve closed
12/1/2012	5:49:13 PM	SiCl4 pre valve closed
12/1/2012	5:49:13 PM	SiCl4 post valve closed
12/1/2012	5:49:13 PM	Main Vac valve closed
12/1/2012	5:49:13 PM	Bypass valve closed
12/1/2012	5:49:13 PM	H2 valve opened
12/1/2012	5:49:13 PM	Bubbler valve opened
12/1/2012	5:49:13 PM	Helium MFC set to  0.000000
12/1/2012	5:49:13 PM	H2 MFC set to  500.000000
12/1/2012	5:49:13 PM	BCl3 MFC set to  0.000000
12/1/2012	5:49:13 PM	PH3 MFC set to  0.000000
12/1/2012	5:49:13 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:49:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:49:14 PM	Tube furnace set to 900
12/1/2012	5:54:14 PM	Helium valve closed
12/1/2012	5:54:14 PM	BCl3 valve closed
12/1/2012	5:54:14 PM	PH3 valve closed
12/1/2012	5:54:14 PM	SiCl4 pre valve closed
12/1/2012	5:54:14 PM	SiCl4 post valve closed
12/1/2012	5:54:14 PM	Main Vac valve closed
12/1/2012	5:54:14 PM	Bypass valve closed
12/1/2012	5:54:14 PM	H2 valve opened
12/1/2012	5:54:14 PM	Bubbler valve opened
12/1/2012	5:54:14 PM	Helium MFC set to  0.000000
12/1/2012	5:54:14 PM	H2 MFC set to  500.000000
12/1/2012	5:54:14 PM	BCl3 MFC set to  0.000000
12/1/2012	5:54:14 PM	PH3 MFC set to  0.000000
12/1/2012	5:54:14 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:54:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:54:14 PM	Tube furnace set to 800
12/1/2012	5:59:14 PM	Helium valve closed
12/1/2012	5:59:14 PM	BCl3 valve closed
12/1/2012	5:59:14 PM	PH3 valve closed
12/1/2012	5:59:14 PM	SiCl4 pre valve closed
12/1/2012	5:59:14 PM	SiCl4 post valve closed
12/1/2012	5:59:14 PM	Main Vac valve closed
12/1/2012	5:59:14 PM	Bypass valve closed
12/1/2012	5:59:14 PM	H2 valve opened
12/1/2012	5:59:14 PM	Bubbler valve opened
12/1/2012	5:59:14 PM	Helium MFC set to  0.000000
12/1/2012	5:59:14 PM	H2 MFC set to  500.000000
12/1/2012	5:59:14 PM	BCl3 MFC set to  0.000000
12/1/2012	5:59:14 PM	PH3 MFC set to  0.000000
12/1/2012	5:59:14 PM	SiCl4 MFC set to  0.000000
12/1/2012	5:59:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	5:59:14 PM	Tube furnace set to 700
12/1/2012	6:04:14 PM	H2 valve closed
12/1/2012	6:04:14 PM	BCl3 valve closed
12/1/2012	6:04:14 PM	PH3 valve closed
12/1/2012	6:04:14 PM	SiCl4 pre valve closed
12/1/2012	6:04:14 PM	SiCl4 post valve closed
12/1/2012	6:04:14 PM	Main Vac valve closed
12/1/2012	6:04:14 PM	Bypass valve closed
12/1/2012	6:04:14 PM	Helium valve opened
12/1/2012	6:04:14 PM	Bubbler valve opened
12/1/2012	6:04:14 PM	Helium MFC set to  500.000000
12/1/2012	6:04:14 PM	H2 MFC set to  0.000000
12/1/2012	6:04:14 PM	BCl3 MFC set to  0.000000
12/1/2012	6:04:14 PM	PH3 MFC set to  0.000000
12/1/2012	6:04:14 PM	SiCl4 MFC set to  0.000000
12/1/2012	6:04:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	6:04:14 PM	Tube furnace set to 0
12/1/2012	6:24:14 PM	Helium valve closed
12/1/2012	6:24:14 PM	H2 valve closed
12/1/2012	6:24:14 PM	BCl3 valve closed
12/1/2012	6:24:14 PM	PH3 valve closed
12/1/2012	6:24:14 PM	SiCl4 pre valve closed
12/1/2012	6:24:14 PM	SiCl4 post valve closed
12/1/2012	6:24:14 PM	Main Vac valve closed
12/1/2012	6:24:14 PM	Bypass valve closed
12/1/2012	6:24:14 PM	Bubbler valve closed
12/1/2012	6:24:14 PM	Helium MFC set to  0.000000
12/1/2012	6:24:14 PM	H2 MFC set to  0.000000
12/1/2012	6:24:14 PM	BCl3 MFC set to  0.000000
12/1/2012	6:24:14 PM	PH3 MFC set to  0.000000
12/1/2012	6:24:14 PM	SiCl4 MFC set to  0.000000
12/1/2012	6:24:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	6:24:15 PM	Tube furnace set to 0
12/1/2012	6:24:16 PM	Run finished at 6:24 PM
12/1/2012	8:48:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	8:48:50 PM	Recipe started at 8:48 PM
12/1/2012	8:48:50 PM	Helium valve closed
12/1/2012	8:48:50 PM	H2 valve closed
12/1/2012	8:48:50 PM	BCl3 valve closed
12/1/2012	8:48:50 PM	PH3 valve closed
12/1/2012	8:48:50 PM	SiCl4 pre valve closed
12/1/2012	8:48:50 PM	SiCl4 post valve closed
12/1/2012	8:48:50 PM	Main Vac valve closed
12/1/2012	8:48:50 PM	Bypass valve closed
12/1/2012	8:48:50 PM	Bubbler valve closed
12/1/2012	8:48:50 PM	Helium MFC set to  0.000000
12/1/2012	8:48:50 PM	H2 MFC set to  0.000000
12/1/2012	8:48:50 PM	BCl3 MFC set to  0.000000
12/1/2012	8:48:50 PM	PH3 MFC set to  0.000000
12/1/2012	8:48:50 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:48:50 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:48:50 PM	Tube furnace set to 0
12/1/2012	8:48:53 PM	H2 valve closed
12/1/2012	8:48:53 PM	BCl3 valve closed
12/1/2012	8:48:53 PM	PH3 valve closed
12/1/2012	8:48:53 PM	SiCl4 pre valve closed
12/1/2012	8:48:53 PM	SiCl4 post valve closed
12/1/2012	8:48:53 PM	Main Vac valve closed
12/1/2012	8:48:53 PM	Bypass valve closed
12/1/2012	8:48:53 PM	Bubbler valve closed
12/1/2012	8:48:53 PM	Helium valve opened
12/1/2012	8:48:53 PM	Helium MFC set to  500.000000
12/1/2012	8:48:53 PM	H2 MFC set to  0.000000
12/1/2012	8:48:53 PM	BCl3 MFC set to  0.000000
12/1/2012	8:48:53 PM	PH3 MFC set to  0.000000
12/1/2012	8:48:53 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:48:53 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:48:53 PM	Tube furnace set to 0
12/1/2012	8:48:59 PM	Helium valve closed
12/1/2012	8:49:00 PM	H2 valve closed
12/1/2012	8:49:00 PM	BCl3 valve closed
12/1/2012	8:49:00 PM	PH3 valve closed
12/1/2012	8:49:00 PM	SiCl4 pre valve closed
12/1/2012	8:49:00 PM	SiCl4 post valve closed
12/1/2012	8:49:00 PM	Main Vac valve closed
12/1/2012	8:49:00 PM	Bypass valve closed
12/1/2012	8:49:00 PM	Bubbler valve closed
12/1/2012	8:49:00 PM	Helium MFC set to  0.000000
12/1/2012	8:49:00 PM	H2 MFC set to  0.000000
12/1/2012	8:49:00 PM	BCl3 MFC set to  0.000000
12/1/2012	8:49:00 PM	PH3 MFC set to  0.000000
12/1/2012	8:49:00 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:49:00 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:49:00 PM	Tube furnace set to 0
12/1/2012	8:49:01 PM	Run finished at 8:49 PM
12/1/2012	8:49:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2012	8:50:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2012	8:50:48 PM	Recipe started at 8:50 PM
12/1/2012	8:50:48 PM	Helium valve closed
12/1/2012	8:50:48 PM	H2 valve closed
12/1/2012	8:50:48 PM	BCl3 valve closed
12/1/2012	8:50:48 PM	PH3 valve closed
12/1/2012	8:50:48 PM	SiCl4 pre valve closed
12/1/2012	8:50:48 PM	SiCl4 post valve closed
12/1/2012	8:50:48 PM	Main Vac valve closed
12/1/2012	8:50:48 PM	Bubbler valve closed
12/1/2012	8:50:48 PM	Bypass valve opened
12/1/2012	8:50:48 PM	Helium MFC set to  0.000000
12/1/2012	8:50:48 PM	H2 MFC set to  0.000000
12/1/2012	8:50:48 PM	BCl3 MFC set to  0.000000
12/1/2012	8:50:48 PM	PH3 MFC set to  0.000000
12/1/2012	8:50:48 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:50:48 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:50:48 PM	Tube furnace set to 0
12/1/2012	8:52:06 PM	Helium valve closed
12/1/2012	8:52:06 PM	H2 valve closed
12/1/2012	8:52:06 PM	BCl3 valve closed
12/1/2012	8:52:06 PM	PH3 valve closed
12/1/2012	8:52:06 PM	SiCl4 pre valve closed
12/1/2012	8:52:06 PM	SiCl4 post valve closed
12/1/2012	8:52:06 PM	Main Vac valve closed
12/1/2012	8:52:06 PM	Bubbler valve closed
12/1/2012	8:52:06 PM	Bypass valve opened
12/1/2012	8:52:06 PM	Helium MFC set to  0.000000
12/1/2012	8:52:06 PM	H2 MFC set to  0.000000
12/1/2012	8:52:06 PM	BCl3 MFC set to  0.000000
12/1/2012	8:52:06 PM	PH3 MFC set to  0.000000
12/1/2012	8:52:06 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:52:06 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:52:06 PM	Tube furnace set to 0
12/1/2012	8:53:06 PM	Helium valve closed
12/1/2012	8:53:06 PM	H2 valve closed
12/1/2012	8:53:06 PM	BCl3 valve closed
12/1/2012	8:53:06 PM	PH3 valve closed
12/1/2012	8:53:06 PM	SiCl4 pre valve closed
12/1/2012	8:53:06 PM	SiCl4 post valve closed
12/1/2012	8:53:06 PM	Bypass valve closed
12/1/2012	8:53:06 PM	Bubbler valve closed
12/1/2012	8:53:06 PM	Main Vac valve opened
12/1/2012	8:53:06 PM	Helium MFC set to  0.000000
12/1/2012	8:53:06 PM	H2 MFC set to  0.000000
12/1/2012	8:53:06 PM	BCl3 MFC set to  0.000000
12/1/2012	8:53:06 PM	PH3 MFC set to  0.000000
12/1/2012	8:53:06 PM	SiCl4 MFC set to  0.000000
12/1/2012	8:53:06 PM	Bypass solenoid MFC set to  0.000000
12/1/2012	8:53:07 PM	Tube furnace set to 0
12/1/2012	8:53:08 PM	Run finished at 8:53 PM
12/1/2012	8:53:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
